Microstructure and Mechanical Properties of a Ni-Based Superalloy Thin Film Investigated by Micropillar Compression

Abstract The microstructure and local micromechanical properties of a Ni-based superalloy thin film produced by magnetron sputtering using ERBO/1 sputter targets were investigated. consists columnar nanograins (an average size ~ 45 nm) with mostly < 111 > orientation. Inside the nanograins, very fine nanotwins an thickness 3 nm are present. In-situ micropillar compression tests, complemented nanoindentation, conducted to evaluate mechanical characteristics. microhardness Young’s modulus correspond 11 255 GPa, respectively, critical strength 4 GPa. plastic deformation micropillars occurs through formation shear band initiating at top pillar. band, globular grains random orientation form during process, while regions near remained unaffected.